Modification-Scanning X-ray Microscopy of Semiconductor Structures Using Kumakhov Optics
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Modification-Scanning X-ray Microscopy of Semiconductor Structures Using Kumakhov Optics

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Romanov A.Yu. Modification-Scanning X-ray Microscopy of Semiconductor Structures Using Kumakhov Optics // Technical physics letters. – 2006. – V.32 - №2 – P.161-163.